Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications
Advanced Nanoscale ULSI Interconnects: Fundamental and Applications brings a comprehensive description of copper based interconnect technology for Ultra Large Scale Integration (ULSI) technology to Integrated Circuit (ICs) application. This book reviews the basic technologies used today for the copp...
| Corporate Author: | |
|---|---|
| Other Authors: | , , , |
| Format: | Electronic |
| Language: | English |
| Published: |
New York, NY :
Springer New York,
2009.
|
| Subjects: | |
| Online Access: | View fulltext via EzAccess |