Advanced MEMS packaging
| Other Authors: | |
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| Format: | Electronic |
| Language: | English |
| Published: |
New York :
McGraw-Hill,
c2010.
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| Subjects: | |
| Online Access: | Books24x7 ebrary View fulltext via EzAccess McGraw-Hill MyiLibrary |
Table of Contents:
- Introduction to MEMS
- Advanced MEMS packaging
- Enabling technologies for advanced MEMS packaging
- Advanced MEMS wafer-level packaging
- Optical MEMS packaging : communications
- Optical MEMS packaging : bubble switch
- Optical MEMS : microbolometer packaging
- Bio-MEMS packaging
- Biosensor packaging
- Accelerometer packaging
- Radiofrequency MEMS switches
- RF MEMS tunable capacitors and tubable band-pass filters
- Advanced packaging of RF MEMS devices.