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|a 621.381
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1 |
# |
|a Liu, Ai-Qun.
|
| 245 |
1 |
0 |
|a Photonic MEMS devices
|b design, fabrication and control /
|c Ai-Qun Liu ; co-authors, Xuming Zhang [and others].
|h [electronic resource] :
|
| 246 |
3 |
# |
|a Photonic micro-electro-mechanical systems devices
|
| 246 |
1 |
# |
|a Optical and photonic MEMS device
|i Available from some providers with title:
|
| 260 |
# |
# |
|a Boca Raton, FL :
|b CRC Press,
|c ©2009.
|
| 300 |
# |
# |
|a 1 online resource (483 pages) :
|b illustrations.
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|a text
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|a Optical science and engineering ;
|v 136
|
| 504 |
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# |
|a Includes bibliographical references.
|
| 588 |
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# |
|a Print version record.
|
| 650 |
# |
0 |
|a Microelectromechanical systems.
|
| 650 |
# |
0 |
|a Photonics.
|
| 650 |
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|a TECHNOLOGY & ENGINEERING
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|x Electronics
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|a TECHNOLOGY & ENGINEERING
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|a Photonics.
|0 (OCoLC)fst01062073
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|a Electronic books.
|
| 776 |
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|a Liu, Ai-Qun.
|d Boca Raton, FL : CRC Press, ©2009
|i Print version:
|t Photonic MEMS devices.
|w (OCoLC)150381346
|w (DLC) 2008301219
|z 9781420045680
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|a Optical science and engineering (Boca Raton, Fla.) ;
|v 136.
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