Photonic MEMS devices design, fabrication and control /
| Main Author: | |
|---|---|
| Format: | Electronic |
| Language: | English |
| Published: |
Boca Raton, FL :
CRC Press,
©2009.
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| Series: | Optical science and engineering (Boca Raton, Fla.) ;
136. |
| Subjects: | |
| Online Access: | View fulltext via EzAccess |