Photonic MEMS devices design, fabrication and control /
| Main Author: | |
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| Format: | Electronic |
| Language: | English |
| Published: |
Boca Raton, FL :
CRC Press,
©2009.
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| Series: | Optical science and engineering (Boca Raton, Fla.) ;
136. |
| Subjects: | |
| Online Access: | View fulltext via EzAccess |
| Physical Description: | 1 online resource (483 pages) : illustrations. |
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| Bibliography: | Includes bibliographical references. |
| ISBN: | 9781420045710 1420045717 |