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01879cam a2200433Ia 4500 |
| 001 |
2220 |
| 003 |
OCoLC |
| 005 |
20130711001119.0 |
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m o d |
| 007 |
cr cnu---unuuu |
| 008 |
090811s2009 nyua ob 001 0 eng d |
| 020 |
# |
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|a 9781607416753 (electronic bk.)
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| 020 |
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|a 1607416751 (electronic bk.)
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|a AU@
|b 000051428605
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|a (OCoLC)429997761
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|a N$T
|b eng
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# |
|a MYTA
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|a TK7874.53
|b .H83 2009eb
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|a 621.3815
|2 22
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| 100 |
1 |
# |
|a Hübner, René.
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| 245 |
1 |
0 |
|a Advanced Ta-based diffusion barriers for Cu interconnects
|c René Hübner.
|h [electronic resource] /
|
| 260 |
# |
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|a New York :
|b Nova Science Publishers,
|c c2009.
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| 300 |
# |
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|a 1 online resource (93 p.) :
|b ill.
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| 504 |
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|a Includes bibliographical references (p. [73]-86) and index.
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| 588 |
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|a Description based on print version record.
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| 650 |
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0 |
|a Interconnects (Integrated circuit technology)
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| 650 |
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0 |
|a Integrated circuits.
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| 650 |
# |
0 |
|a Electrodiffusion.
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| 650 |
# |
7 |
|a TECHNOLOGY & ENGINEERING
|x Circuits
|x Integrated.
|x Electronics
|2 bisacsh
|
| 650 |
# |
7 |
|a TECHNOLOGY & ENGINEERING
|x Circuits
|x General.
|x Electronics
|2 bisacsh
|
| 655 |
# |
4 |
|a Electronic books.
|
| 655 |
# |
7 |
|a Electronic books.
|2 local
|
| 776 |
0 |
8 |
|a Hübner, René.
|d New York : Nova Science Publishers, c2009
|i Print version:
|t Advanced Ta-based diffusion barriers for Cu interconnects.
|w (OCoLC)192082716
|w (DLC) 2008008583
|z 1604564512
|z 9781604564518
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|z View fulltext via EzAccess
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