1
Published 2010
Table of Contents: '; ...Introduction to PowerMEMS -- System design considerations and device overview -- Materials...
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Electronic
2
by Acar, Cenk., Shkel, Andrei.
Published 2009
Table of Contents: '; ... design of MEMS gyroscopes -- Electrical design of MEMS gyroscopes -- Linear multi-DOF architecture...
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Electronic
3
by Liu, Ai-Qun.
Published 2010
...MEMS Reference Shelf,...
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Electronic
4
5
by Solgaard, Olav.
Published 2009
Table of Contents: '; ... -- Optical MEMS scanners -- Micromirror arrays - amplitude and phase modulation -- Grating light modulators...
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Electronic
6
...MEMS Reference Shelf,...
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Electronic