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1
Published 2010
Table of Contents: ';
“...Introduction to PowerMEMS -- System design considerations and device overview -- Materials...”Get full text
Electronic
2
Table of Contents: ';
“... design of MEMS gyroscopes -- Electrical design of MEMS gyroscopes -- Linear multi-DOF architecture...”
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Electronic
3
4
by Solgaard, Olav.
Published 2009
Subjects: ';
“...MEMS. swd...”Published 2009
ebrary
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Electronic
5
by Solgaard, Olav.
Published 2009
Table of Contents: ';
“... -- Optical MEMS scanners -- Micromirror arrays - amplitude and phase modulation -- Grating light modulators...”Published 2009
Get full text
Electronic
6