Photonic Microsystems Micro and Nanotechnology Applied to Optical Devices and Systems /
Photonic Microsystems: Micro and Nanotechnology Applied to Optical Devices and Systems describes MEMS technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics. Photonic Microsystems also desc...
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| Format: | Electronic |
| Language: | English |
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Boston, MA :
Springer US,
2009.
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| Series: | MEMS Reference Shelf,
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| Online Access: | https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-0-387-68351-5 |