Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines /
Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark At...
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Electronic |
| Language: | English |
| Published: |
Boston, MA :
Springer US : Imprint: Springer,
2010.
|
| Series: | MEMS Reference Shelf,
|
| Subjects: | |
| Online Access: | https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-0-387-77747-4 |