Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing /

• Main Author: Gao, Wei. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic
• Language: English
• Published: London : Springer London, 2010.
• Series: Springer Series in Advanced Manufacturing,
• Subjects: Engineering.; Control engineering systems.; Machinery.; Nanotechnology.; Manufacturing, Machines, Tools.; Measurement Science and Instrumentation.; Control , Robotics, Mechatronics.
• Online Access: https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-1-84996-254-4

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to...

Table of Contents:

• 1. Angle Sensor for Measurement of Surface Slope and Tilt Motion
• 2. Laser Autocollimator for Measurement of Multi-axis Tilte Motion
• 3. Surface Encoder for Measurement of In-plane Motion
• 4. Grating Encoder for Measurement of In-plane and Out-of-plane Motion
• 5. Scanning Multi-probe System for Measurement of Roundness
• 6. Scanning Error Separation System for Measurement of Straightness
• 7. Scanning Micro-stylus System for Measurement of Micro-aspherics
• 8. Large Area Scanning Probe Microscope for Micro-textured Surface
• 9. Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructure
• 10. Scanning Image-sensor System for Measurement of Micro-dimension.