Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing /
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to...
| Main Author: | |
|---|---|
| Corporate Author: | |
| Format: | Electronic |
| Language: | English |
| Published: |
London :
Springer London,
2010.
|
| Series: | Springer Series in Advanced Manufacturing,
|
| Subjects: | |
| Online Access: | https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-1-84996-254-4 |