Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Lang, Jeffrey. (Editor)
• Format: Electronic
• Language: English
• Published: Boston, MA : Springer US : Imprint: Springer, 2010.
• Series: MEMS Reference Shelf,
• Subjects: Engineering.; Computer engineering.; Electronics.; Systems engineering.; Electric engineering.; Electronics and Microelectronics, Instrumentation.; Energy Technology.; Circuits and Systems.; Electrical Engineering.; Energy, general.
• Online Access: https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-0-387-77747-4

Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark At...

Table of Contents:

• Introduction to PowerMEMS
• System design considerations and device overview
• Materials, structures, and packaging
• Microengine fabrication
• Fabrication of microscale rotating magnetic machines
• High-speed gas bearings for micro-turbomachinery
• Thermofluids and turbomachinery
• Motors and generators
• Microcombustors for rotating machinery.