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Material Science and MEMS Production Selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China

Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Mate...

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Bibliographic Details
Corporate Author:	Selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China
Format:	Electronic
Language:	English
Published:	Switzerland : Trans Tech Publications Ltd, 2014.
Subjects:	MEMS Nanoparticle Buckling Natural Frequency Core-Shell Electronic books.
Online Access:	View fulltext via EzAccess

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