Material Science and MEMS Production Selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China

• Corporate Author: Selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China
• Format: Electronic
• Language: English
• Published: Switzerland : Trans Tech Publications Ltd, 2014.
• Subjects: MEMS; Nanoparticle; Buckling; Natural Frequency; Core-Shell; Electronic books.
• Online Access: View fulltext via EzAccess
• Physical Description: 128 p.: ill.
• Format: Mode of access: World Wide Web.
• Bibliography: Includes bibliographical references and index.
• ISBN: 9783038264286; 3038264288

Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Materials Science, Processing and Application, MEMS Design and Production