FIB Nanostructures

FIB Nanostructures reviews a range of methods, including milling, etching, deposition, and implantation, applied to manipulate structures at the nanoscale. Focused Ion Beam (FIB) is an important tool for manipulating the structure of materials at the nanoscale, and substantially extends the range of...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Wang, Zhiming M. (Editor)
Format: Electronic
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2013.
Series:Lecture Notes in Nanoscale Science and Technology, 20
Subjects:
Online Access:View fulltext via EzAccess