Helium Ion Microscopy Principles and Applications /

• Main Author: Joy, David C. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic
• Language: English
• Published: New York, NY : Springer New York : Imprint: Springer, 2013.
• Series: SpringerBriefs in Materials,
• Subjects: Spectroscopy.; Nanotechnology.; Surfaces (Physics).; Materials Science.; Characterization and Evaluation of Materials.; Spectroscopy and Microscopy.; Spectroscopy/Spectrometry.; Nanoscale Science and Technology.
• Online Access: https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-1-4614-8660-2

Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions  such as the Helium Ion Microscope (HIM)  are destined to become the imaging tools of choice for the 21st century. Topics covered includ...

Table of Contents:

• Chapter 1: Introduction to Helium Ion Microscopy
• Chapter 2: Microscopy with Ions �- A brief history
• Chapter 3: Operating the Helium Ion Microscope
• Chapter 4: Ion Solid �Interactions� and Image Formation
• Chapter 5: Charging and� Damage
• Chapter 6: Microanalysis with the HIM
• Chapter 7: Ion Generated Damage
• Chapter 8: Working with other Ion beams
• Chapter 9: Patterning and Nanofabrication
• Conclusion
• Bibliography
• Appendix: iSE Yields,� and IONiSE� parameters for �He+ excitation� of Elements and Compounds
• Index.