Mechanics and Physics of Precise Vacuum Mechanisms
In this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comprehensible way. Topics treated include the me...
| Main Authors: | , , , |
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| Corporate Author: | |
| Format: | Electronic |
| Language: | English |
| Published: |
Dordrecht :
Springer Netherlands,
2010.
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| Series: | Fluid Mechanics and Its Applications,
91 |
| Subjects: | |
| Online Access: | https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-90-481-2520-3 |