RF MEMS Switches and Integrated Switching Circuits Design, Fabrication, and Test /

• Main Author: Liu, Ai-Qun. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic
• Language: English
• Published: Boston, MA : Springer US : Imprint: Springer, 2010.
• Series: MEMS Reference Shelf, 5
• Subjects: Engineering.; Mechanical engineering.; Electronics.; Systems engineering.; Circuits and Systems.; Mechanical Engineering.; Electronics and Microelectronics, Instrumentation.
• Online Access: https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-0-387-46262-2

Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also...

Table of Contents:

• Introduction
• Lateral DC Contact Switch
• Broadband Capacitive Switch
• Micromachined Coplanar Waveguide (CPW) Transmission Line
• Integrated Micromachined Switch Circuits
• Tunable Electromagnetic Bandgap (EBG) Bandstop Filter
• Tunable Bandpass Filter
• Deep Etching and Wafer Bonding Process
• Surface Micromachining Process
• Mechanical Design and Properties of RF Switches
• Dynamic Analysis and Modeling of RF Switches
• Conclusions
• Index.