Introductory MEMS Fabrication and Applications /

• Main Authors: Adams, Thomas M. (Author), Layton, Richard A. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic
• Language: English
• Published: Boston, MA : Springer US, 2010.
• Edition: 1.
• Subjects: Engineering.; Mechanics.; Materials.; Electronics.; Systems engineering.; Surfaces (Physics).; Electronics and Microelectronics, Instrumentation.; Circuits and Systems.; Surfaces and Interfaces, Thin Films.; Continuum Mechanics and Mechanics of Materials.
• Online Access: https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-0-387-09511-0

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on ME...

Table of Contents:

• Preface
• Part I: Fabrication
• Introduction
• The Substrate and Adding To It
• Creating Patterns-Lithography
• Creating Structures-Micromachining
• Solid Mechanics
• Part II: Applications
• Thinking About Modeling
• MEMS Transducers-An Overview of How They Work
• Piezoresistive Transducers
• Capacitive Transducers
• Piezoelectric Transducers
• Thermal Transducers
• Introduction to Microfluidics
• Microfabrication Laboratories
• Appendices
• Glossary
• Index.