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Low Pressure Plasmas and Microstructuring Technology

This monograph presents an up to date perspective of gas discharge physics and its applications to various industries. It starts from a comprehensive overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electr...

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Bibliographic Details
Main Author: Franz, Gerhard. (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2009.
Subjects:
Materials.
Molecular structure.
Electronics.
Optical materials.
Surfaces (Physics).
Material Science.
Optical and Electronic Materials.
Electronics and Microelectronics, Instrumentation.
Surfaces and Interfaces, Thin Films.
Atomic and Molecular Structure and Spectra.
Online Access:https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-3-540-85849-2

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https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-3-540-85849-2

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