Control and Optimization of Multiscale Process Systems
Interest in the control and optimization of multiscale process systems has been triggered by the need to achieve tight feedback control and optimal operation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly couple...
| Main Authors: | , , , |
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| Corporate Author: | |
| Format: | Electronic |
| Language: | English |
| Published: |
Boston :
Birkhũser Boston,
2009.
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| Series: | Control Engineering
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| Subjects: | |
| Online Access: | https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-0-8176-4793-3 |