MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness /

• Main Authors: Acar, Cenk. (Author), Shkel, Andrei. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic
• Language: English
• Published: Boston, MA : Springer US, 2009.
• Series: MEMS Reference Shelf,
• Subjects: Engineering.; Mechanical engineering.; Electronics.; Systems engineering.; Electronics and Microelectronics, Instrumentation.; Circuits and Systems.; Automotive Engineering.; Mechanical Engineering.
• Online Access: https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-0-387-09536-3

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the...

Table of Contents:

• Introduction
• Fundamentals of micromachined gyroscopes
• Fabrication technologies
• Mechanical design of MEMS gyroscopes
• Electrical design of MEMS gyroscopes
• Linear multi-DOF architecture
• Torsional multiple-DOF architecture
• Distributed-Mass architecture
• Conclusions and future trends.