Handbook of deposition technologies for films and coatings science, applications and technology
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| Format: | Electronic |
| Published: |
Amsterdam
Elsevier
c2010.
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| Edition: | 3rd ed. |
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| Online Access: | View fulltext via EzAccess |
| Physical Description: | 1 online resource |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780815520313 (eBook) |