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| LEADER |
00665nam a2200169Ia 4500 |
| 001 |
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2016322125051 |
| 008 |
160422s9999 xx 000 0 und d |
| 020 |
# |
# |
|a 9780080521954 (ebook)
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| 100 |
1 |
0 |
|a Muraka, Shyam P.
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| 245 |
1 |
0 |
|a Interlayer Dielectrics for Semiconductor Technologies
|c Muraka, Shyam P;Eizenberg, Moshe;Sinha, Ashok K
|h [electronic resource]
|
| 260 |
# |
# |
|a Amsterdam
|b Elsevier
|c 2003
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| 300 |
# |
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|a 1 online resource
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| 650 |
# |
0 |
|a Semiconductor wafers
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| 700 |
1 |
0 |
|a Eizenberg, Moshe.
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| 700 |
1 |
0 |
|a Sinha, Ashok K.
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| 856 |
4 |
0 |
|u https://ezaccess.library.uitm.edu.my/login?url=http://www.sciencedirect.com/science/book/9780125112215
|z View fulltext via EZaccess
|