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| LEADER |
00629nam a2200145Ia 4500 |
| 001 |
31707 |
| 005 |
2016321175752 |
| 008 |
160421s9999 xx 000 0 und d |
| 020 |
# |
# |
|a 9781591242758 (eBook)
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| 100 |
1 |
0 |
|a Helbert, John N.
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| 245 |
1 |
0 |
|a Handbook of VLSI Microlithography
|b principles, technology, and applications
|c Helbert, John N.
|h [electronic resource]
|
| 260 |
# |
# |
|a Norwich, N.Y.
|b William Andrew
|c 2001
|
| 300 |
# |
# |
|a 1 online resource
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| 650 |
# |
0 |
|a Integrated circuits
|x Very large scale integration
|
| 856 |
4 |
0 |
|u https://ezaccess.library.uitm.edu.my/login?url=http://www.sciencedirect.com/science/book/9780815514442
|z View fulltext via EZaccess
|