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2016321143255 |
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160421s9999 xx 000 0 und d |
| 020 |
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|a 9780080455624 (eBook)
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| 100 |
1 |
0 |
|a Bao, Minhang
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| 245 |
1 |
0 |
|a Analysis and Design Principles of MEMS Devices
|c Bao, Minhang
|h [electronic resource]
|
| 260 |
# |
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|a Amsterdam
|b Elsevier
|c 2005
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| 300 |
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|a 1 online resource
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| 650 |
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0 |
|a Microelectromechanical systems
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| 856 |
4 |
0 |
|u https://ezaccess.library.uitm.edu.my/login?url=http://www.sciencedirect.com/science/book/9780125947510
|z View fulltext via EZaccess
|