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|a 9780815515777 (eBook)
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| 100 |
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|a Bahreyni, Behraad
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| 245 |
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|a Fabrication & Design of Resonant Microdevices
|c Bahreyni, Behraad
|h [electronic resource]
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| 260 |
# |
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|a Norwich, NY
|b W. Andrew Inc.
|c 2008
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| 300 |
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|a 1 online resource
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| 650 |
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|a Microelectromechanical systems
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| 856 |
4 |
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|u https://ezaccess.library.uitm.edu.my/login?url=http://www.sciencedirect.com/science/book/9780815515777
|z View fulltext via EZaccess
|