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|a 9780815517733 (eBook)
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| 100 |
1 |
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|a Reinhardt, Karen A.
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| 245 |
1 |
0 |
|a Handbook of Silicon Wafer Cleaning Technology
|c Reinhardt, Karen A.;Kern, Werner
|h [electronic resource]
|
| 260 |
# |
# |
|a Norwich, NY
|b William Andrew
|c 2008
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| 300 |
# |
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|a 1 online resource
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| 650 |
# |
0 |
|a Silicon-on-insulator technology
|
| 700 |
1 |
0 |
|a Kern, Werner
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| 856 |
4 |
0 |
|u https://ezaccess.library.uitm.edu.my/login?url=http://www.sciencedirect.com/science/book/9780815515548
|z View fulltext via EZaccess
|