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00655nam a2200169Ia 4500 |
| 001 |
30985 |
| 005 |
2016320175217 |
| 008 |
160420s9999 xx 000 0 und d |
| 020 |
# |
# |
|a 9783540336556 (eBook)
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| 100 |
1 |
0 |
|a Korvink, Jan G.
|
| 245 |
1 |
0 |
|a MEMS
|b a practical guide to design, analysis, and applications
|c Korvink, Jan G.; Paul, Oliver
|h [electronic resource]
|
| 260 |
# |
# |
|a Norwich, NY
|b Heidelberg, Germany
|c 2006
|
| 300 |
# |
# |
|a 1 online resource
|
| 650 |
# |
0 |
|a Microelectromechanical systems
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| 700 |
1 |
0 |
|a Paul, Oliver
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| 856 |
4 |
0 |
|u https://ezaccess.library.uitm.edu.my/login?url=http://www.sciencedirect.com/science/book/9780815514978
|z View fulltext via EZaccess
|