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00636nam a2200157Ia 4500 |
| 001 |
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2016319155156 |
| 008 |
160419s9999 xx 000 0 und d |
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|a 9780815514428 (eBook)
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| 100 |
1 |
0 |
|a Seshan, Krishna
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| 245 |
1 |
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|a Handbook of Thin-Film Deposition Processes and Techniques
|b Principles, Methods, Equipment and Applications
|c Krishna Seshan
|h [electronic resource]
|
| 260 |
# |
# |
|a Burlington
|b William Andrew, Inc.
|c 2001
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| 300 |
# |
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|a 1 online resource
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| 650 |
# |
0 |
|a Thin Films
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| 856 |
4 |
0 |
|u https://ezaccess.library.uitm.edu.my/login?url=http://www.sciencedirect.com/science/book/9780815514428
|z View fulltext via EZaccess
|