Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control
Main Author: | |
---|---|
Format: | Electronic |
Language: | Undetermined |
Published: |
Westwood, N.J.
Noyes Publications
1998
|
Subjects: | |
Online Access: | View fulltext via EZaccess |
Physical Description: | 1 online resource |
---|---|
ISBN: | 9781591240792 (eBook) |