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160419s9999 xx 000 0 und d |
| 020 |
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|a 9781282755086 (eBook)
|
| 100 |
1 |
0 |
|a Popov, Oleg A.
|
| 245 |
1 |
0 |
|a High Density Plasma Sources
|b Design, Physics and Performance
|c Oleg A. Popov
|h [electronic resource]
|
| 260 |
# |
# |
|a Burlington
|b Elsevier
|c 1996
|
| 300 |
# |
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|a 1 online resource
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| 650 |
# |
0 |
|a Plasma density
|
| 856 |
4 |
0 |
|u https://ezaccess.library.uitm.edu.my/login?url=http://www.sciencedirect.com/science/book/9780815513773
|z View fulltext via EZaccess
|