Microsystem Design

• Main Author: Senturia, Stephen D. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic
• Language: English
• Published: Boston, MA : Springer US, 2001.
• Subjects: Engineering.; Mechanics.; Electrical engineering.; Optical materials.; Electronic materials.; Electrical Engineering.; Optical and Electronic Materials.
• Online Access: View fulltext via EzAccess

It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this bookỚ"s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects...

Table of Contents:

• Getting Started
• An Approach to Mems Design
• Microfabrication
• Process Integation
• Modeling Strategies
• Lumped Modeling with Circuit Elements
• Energy-conserving Transducers
• Lumped-element System Dynamics
• Domain-Specific Details
• Elasticity
• Structures
• Energy Methods
• Dissipation and the Thermal Energy Domain
• Lumped Modeling of Dissipative Processes
• Fluids
• Circuit and System Issues
• Electronics
• Feedback Systems
• Noise
• Case Studies
• Packaging
• A Piezoresistive Pressure Sensor
• A Capacitive Accelerometer
• Electrostatic Projection Displays
• A Piezoelectric Rate Gyroscope
• Microsystems for DNA Amplification
• A Microbridge Combustible-gas Sensor.