Electron Kinetics and Applications of Glow Discharges

This book resulted from the NATO Advanced Research Workshop on ỚSElectron Kinetics and Applications of Glow Discharges,Ớ<U+00fd> held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of se...

Full description

Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Kortshagen, Uwe. (Editor), Tsendin, Lev D. (Editor)
Format: Electronic
Language:English
Published: Boston, MA : Springer US, 1998.
Series:NATO Science Series: B, Advanced Science Institutes Series, 367
Subjects:
Online Access:View fulltext via EzAccess