Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis

• Corporate Author: SpringerLink (Online service)
• Other Authors: Czanderna, Alvin W. (Editor), Madey, Theodore E. (Editor), Powell, Cedric J. (Editor)
• Format: Electronic
• Language: English
• Published: Boston, MA : Springer US, 2002.
• Series: Methods of Surface Characterization ; 5
• Subjects: Materials science.; Analytical chemistry.; Optical materials.; Electronic materials.; Materials Science.; Characterization and Evaluation of Materials.; Optical and Electronic Materials.; Analytical Chemistry.
• Online Access: View fulltext via EzAccess

Many books are available that detail the basic principles of the different methods of surface characterization. On the other hand, the scientific literature provides a resource of how individual pieces of research are conducted by particular labo- tories. Between these two extremes the literature is...

Table of Contents:

• Photon Beam Damage and Charging at Solid Surfaces
• Electron Beam Damage at Solid Surfaces
• Ion Beam Bombardment Effects on Solid Surfaces at Energies Used for Sputter Depth Profiling
• Characterization of Surface Topography
• Depth Profiling Using Sputtering Methods.