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00598na a2200169 a 4500 |
| 001 |
19679 |
| 005 |
201623116230 |
| 020 |
# |
# |
|a 9783038136828
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| 245 |
1 |
# |
|a Silicon Science and Advanced Micro-Device Engineering II
|c Osamu Hanaizumi, Masafumi Unno and Kenta Miura
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| 260 |
# |
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|a Switzerland
|b Trans Tech Publications
|c 2012
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| 650 |
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0 |
|a Nanostructures
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| 650 |
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0 |
|a Silicon
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| 650 |
# |
0 |
|a Microelectronics
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| 700 |
1 |
# |
|a Hanaizumi, Osamu
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| 700 |
1 |
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|a Unno, Masafumi
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| 700 |
1 |
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|a Miura, Kenta
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| 856 |
4 |
0 |
|u https://ezaccess.library.uitm.edu.my/login?url=http://www.ttp.net/ebook/978-3-03785-285-9
|z View fulltext via EzAccess
|