Multilayer Integrated Film Bulk Acoustic Resonators

• Main Authors: Zhang, Yafei. (Author), Chen, Da. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
• Subjects: Engineering.; Surfaces (Physics).; Nanotechnology and Microengineering.; Surfaces and Interfaces, Thin Films.; Solid State Physics.
• Online Access: https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-3-642-31776-7

Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated...

Table of Contents:

• Introduction
• Propagation of Acoustic Wave in Crystals
• The Theory of FBAR
• The Sputtering Deposition and Etching of AlN Film
• The Membrane Structured FBAR
• Solidly Mounted Acoustic Resonator
• The Application of FBAR in RF Filters
• The FBAR Excited by Lateral Filed
• High Sensitive Sensors Based on FBAR.