Ion Beams in Materials Processing and Analysis
A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in m...
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| Format: | Electronic |
| Language: | English |
| Published: |
Vienna :
Springer Vienna : Imprint: Springer,
2013.
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| Online Access: | https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-3-211-99356-9 |