Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who ha...
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| Other Authors: | , , |
| Format: | Electronic |
| Language: | English |
| Published: |
Dordrecht :
Springer Netherlands,
2010.
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| Series: | NATO Science for Peace and Security Series B: Physics and Biophysics,
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| Subjects: | |
| Online Access: | https://ezaccess.library.uitm.edu.my/login?url=http://dx.doi.org/10.1007/978-90-481-3807-4 |